The spectroscopic ellipsometer is used for thin film and material characterization in R & D. The spectroscopic ellipsometer is designed to meet the requirements in modern research with special emphasis on speed and accuracy for an unmatched variety of applications.
Product's Feature
■Thin film thickness
■Reflection
■Transmission
■Refractive index
■Absorption
■Material composition
■Index gradient
■More simple and efficient method of sample alignment
■Experimental data and simulated data with 3D graphics
■ Powerful spectroscopic ellipsometry measurement and analysis software
Technique Specification
■Wavelength range :350-850nm, 250-1100nm, 190-1700nm: 0.002 ° ~ 0.02 °
■ Wavelength accuracy: 1nm
■ Measuring time: <8s (depending on measurement mode and roughness)
■ Sample size: 125x125mm 156x156mm, 200x200mm cells, other sizes
■ Accuracy: 0.02nm
■ Refraction rate: 0.0002, 100nmSiO2 on Si
■ Angle accuracy: 0.01
■Thickness range 0.01 nm - 50,000 nm
■ Extinction ratio : 10-6
Typical Customer:
American,Europe and Asia and so on.
